Filtered cathodic vacuum arc deposition (FCVAD) technology as method for creation of nanostructured multicomponent modifying coatings for wide application range

Abstract

Modern production requires the development of new structural materials with improved mechanical and chemical properties. One of the methods to create such materials is to deposit solid modifying coatings onto softer and more ductile substrates. Moreover, such coatings may also have good barrier properties with respect to chemical interaction and interdiffusion. The use of nanolayer and superlattice architecture is an effective method to create such modifying coatings with a unique combination of extremely high hardness (up to 80 GPa), good brittle fracture resistance, as well as barrier properties. The considered method of filtered cathodic vacuum arc deposition (FCVAD) makes it possible to synthesize coatings with controlled nanolayer thicknesses from 2 up to 100 nm, with the total coating thickness of up to 20 µm. Another important feature of the considered method is the possibility to generate multicomponent and high-entropic coatings for the wide application range (cutting tools, medical devices, friction pairs, etc.). The possibility to create a dense coating structure, free of microdroplets and micropores, makes it possible to use the proposed technology to create insulating coatings for medical purposes. The additional possibility is the creation of both biologically passive and biologically active coatings (in particular, coatings containing micro- or nanoparticles of silver).