Abstract
We investigated the gas-phase reactions of source molecules for metalorganic chemical vapor deposition (MOCVD) of barium strontium titanate (BST) films to study how the precursors for each element are formed from the source molecules in the gas phase. By microdischarge optical emission spectroscopy (µD-OES) and in situ infrared absorption spectroscopy under actual CVD conditions, we found that the addition of oxidation gas has more effects on the creation of Sr precursors than that of Ti precursors. Moreover, we deposited strontium oxide, titanium oxide and strontium titanate (STO) films to investigate the deposition mechanism of BST films from various angles. The results of these deposition experiments were consistent with the precursor formation mechanism suggested from the spectroscopic diagnoses.
Sign-in/Register to access full text options 
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
