Abstract
YBCO thin films were prepared on different kinds of single-crystal substrates by two film growth methods with evaporation deposition: i.e., layer-by-layer growth and block-by-block growth. In layer-by-layer growth, we observed the oscillation of Reflection High Energy Electron Diffraction (RHEED) intensity, representing unit cell growth. In block-by-block growth, though we were unable to observe RHEED intensity oscillation, film growth was speculated by RHEED patterns and XRD data. We also measured X-ray reflection data for various films prepared on different substrates by the two film growth methods. The reflection data was collected for incident beam angles of 0.5 to 1.5°. The roughness of the film surface and film/substrate interface was analyzed by X-ray reflectivity theory. We discuss the film growth on different substrates. Furthermore, the relation between film roughness and film growth method will also be discussed.
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