Film failure at earlier and later stages of nanoindentation in static and sliding modes

Abstract

Crack growth needs to be restricted in ceramics used for biomedical, microelectronic, and any structural applications whatsoever. Having the know-how of its initiation and propagation will save the material from getting fractured. For materials used in high-precision applications, nanoindentation (static) and scratch tests (sliding) serve the purpose of meticulous investigations of understanding crack propagation. The fractographic analysis of the hard ceramic coating of SiCN on silicon substrates has been given in this communication. The pertaining factors like residual stress, geometry, and elastoplastic deformations were correlated. Finite Element Analysis provided insights into the chronological stress distribution. Parameters like stress intensity factors and interfacial fracture energy were determined. It was found that the initiation of coating failure has its roots in much earlier stages of indentation.