Abstract
A film bulk acoustic wave resonator and filter at GHz frequencies is reported. The resonator and filter employ lead titanate (PbTiO/sub 3/) as the piezoelectric thin film. The films are formed by RF magnetron sputter deposition on silicon (Si) substrates. Platinum (Pt) is used as top and bottom electrodes. The thickness of the piezoelectric film is about 1 /spl mu/m, and that of the electrodes is 0.1 /spl mu/m. The chip size of the resonator and filter is 0.69/spl times/0.55 (mm). The resonant frequency of the fabricated resonator is 1.4 GHz. The top electrode size of the resonator is 50/spl times/50 (/spl mu/m), and the quality factor Q is about 70. The insertion loss of the fabricated filter is 13.6 dB at the frequency of 1.5 GHz, and the 3 dB bandwidth is 47 MHz.
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