Abstract
A figure of merit (FOM) has been developed for focusing quadrupole multiplet lenses for ion micro- and nanobeam systems. The method which is based on measurement of the central peak of the two-dimensional autocorrelation function of an image provides separate FOM for the horizontal and vertical directions. The approach has been tested by comparison with the edge widths obtained by nonlinear fitting the edge widths of a Ni grid and found to be reliable. The FOM has the important advantage for ion beam imaging of biomedical samples that the fluence needed is considerably lower than for edge fitting.
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