Abstract
This paper reports on figure-of-merit (FoM) enhancement techniques for a new class of lithium niobate (LN)-based microelectromechanical systems laterally vibrating resonators (LVRs). A weighted electrode configuration is used to experimentally demonstrate a more than 2× enhancement for the device electromechanical coupling kt2, and an optimized reactive ion etch is used to attain straighter LN sidewalls and subsequently a 3× improvement in quality factor (Q=1300). As a result, the resonators orientated 30 ° to +y in the x-cut plane exhibited a kt2 of 21.7%, and a quality factor of 1300, effectively corresponding to an FoM of 280-the highest demonstrated to date for LVRs. These devices are expected to provide an unprecedented and unmatched platform for frequency-agile and adaptive RF filtering technology.
Talk to us
Join us for a 30 min session where you can share your feedback and ask us any queries you have
Schedule a callDisclaimer: All third-party content on this website/platform is and will remain the property of their respective owners and is provided on "as is" basis without any warranties, express or implied. Use of third-party content does not indicate any affiliation, sponsorship with or endorsement by them. Any references to third-party content is to identify the corresponding services and shall be considered fair use under The CopyrightLaw.
