Abstract
Errors in the thickness of the coating deposited on an optical component contribute to the fabrication-related performance deterioration of an optical system. We analyze the effects of systematic thickness errors, as might be generated during the coating fabrication process. The reflectivity changes only minimally from the non-perturbed values. However, the phase is very sensitive to the coating error. The effect of the coating thickness error on the performance of an optical element is two-fold. The layer thickness error results in a phase shift that differs from the design values for both the s- and p-polarized light. The coating thickness error may additionally change the apparent surface figure of the optical component. Using the numerically-controlled diamond turning machines, a component may be fabricated intentionally with a requisite figure error to compensate for the coating thickness error.
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