Abstract
Nanoscale characterization of fieldinduced displacement was made in compositionally graded PZT thin film according to the inverse piezoelectric effects by SFM in contact mode. The nanoscale piezoelectric displacement electric field butterfly loop was obtained due to the combined contribution from linear piezoelectric effect and domain switching effect, which substantiate nanoscale validity of CaspariMerz theory. The nanoscale imprint phenomena were also observed in the thin film.
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