Abstract

Nanoscale characterization of fieldinduced displacement was made in compositionally graded PZT thin film according to the inverse piezoelectric effects by SFM in contact mode. The nanoscale piezoelectric displacement  electric field butterfly loop was obtained due to the combined contribution from linear piezoelectric effect and domain switching effect, which substantiate nanoscale validity of CaspariMerz theory. The nanoscale imprint phenomena were also observed in the thin film.

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