Abstract
The concept of a miniature X-ray source is presented. The source consists of a micromachined field-emitting cathode and an anode. Electrons emitted from the cathode are accelerated towards and into the anode where their deceleration produces X-rays. The energy of the X-rays is controlled by the voltage applied to the electrodes, and the dose rate by the emission current. A tentative medical application is discussed and candidate field emission structures are investigated. Spectra from different anode materials have been collected using diamond cold cathodes.
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