Abstract
The subject of this article is to review the current state of the art and the trends of the development of vacuum gauges using various types of cold-cathode electron sources (e.g. silicon field-emitter arrays, emitter arrays of the Spindt-type, carbon-based field emitters, MIM cathodes, p-n junctions). Recent progress in design and fabrication of novel vacuum pressure sensors based on field-emitter cathodes is described and discussed. The advantages and the problems of such gauges are briefly reviewed.
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