Abstract
Carbon nanotubes (CNTs) arrays were prepared by microwave plasma-enhanced chemical vapor deposition (MPCVD) method. Nickel layer of 7 nm in thickness on 100-nm thickness titanium nitride film was transformed into discrete islands after hydrogen plasma pretreatment. CNTs were then grown up on Ni-coated areas by MPCVD. Their field emission properties were studied and evaluated. From formulism analysis, superior CNT films with very low emission onset electric field, about 0.425 V/micron (at J =10 micro-A/cm<sup>2</sup>), are attained without post-deposition treatment. The large field amplification factor arising from small curvature radius of nanotube tips is responsible for good emission characteristics.
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