Abstract

Carbon nanotubes (CNTs) are prepared on NiCr alloy films by low pressure thermal chemical vapor deposition at 600 °C. NiCr alloy films are deposited by magnetic co-sputtering method, and the various thickness and Ni/NiCr ratios are controlled by sputtering power. The diameter and length of CNTs, as well as the roughness of the CNTs films, mainly depend on the Ni/NiCr ratio. The field emission current density of the CNTs film increases with the increasing Ni/NiCr ratio from 65 wt% to 83 wt%, and decreases when the Ni/NiCr ratio is more than 87 wt% in the alloy film.

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