Abstract
When the expression “electron microscopy” is used, the mutual association is either with a transmission electron microscope (TEM) or a scanning electron microscope (SEM). The SEM obtains surface topographic information by collecting serially the secondary, or backscattered, electrons derived from the interaction of a focused beam of primary electrons scanned across the surface. But a TEM can be used to image surface structures directly at very small angles in what is commonly called the “reflection” mode or by using the weak diffraction spots from the relaxed near-surface lattice. There is another form of surface electron microscopy, field emission electron microscopy (FEEM or FEM), which preceded both TEM and SEM but has been little used in recent years. FEM remains a powerful and unique surface electron microscopy, which has not been truly superceded by any other method. Specimens used for FEM must be either conductors or semiconductors because electrons are emitted from them.
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