Abstract

Field emission ion sources are the brightest ion sources presently known. The high ion optical brightness of these sources has been exploited to produce focused ion beams of very small size with high current densities, and this has opened important new technological fields. There are two types of field emission ion sources now in use. These are the gas field ion source (GFIS), which ionizes material from the gas phase by field ionization, and the liquid metal ion source (LMIS), which produces ions from the liquid phase primarily by the process of field evaporation. This chapter reviews the physical mechanism of ion production in GFISs and LMISs. It discusses the properties of the sources that are important for their use in focused ion beam. The chapter also discusses the implications of the source properties for focusing systems.

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