Abstract
Good resolution is obtained with a conventional transmission electron microscope (TEM). Nevertheles, an atomic scale analysis is difficult because of insufficient probe current. A field emission gun (FEG) provides a higher brightness and more monochromatic beam than a thermionic one. Thus, an FEG can be expected to improve the abilities of a TEM. The low energy spread(∼0.5 eV) attainable with the FEG reduces chromatic aberrations and a brighter image can be expected, making more discernible details. In addition, a high beam current is formed in a small spot, enabling precise element analysis at the nanometer level. Moreover, the illuminating angle obtained on a specimen is so small that electron diffraction can be clearly obtained for structure analysis of crystals. Experimental FE-TEMs with lower accelerating voltage than 100kV have already been developed. Using an electron holography technique, micro magnetic flux was observed with a high coherency beam. FE-TEMs with a higher accelerating voltage are required in various fields of material science.
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