Abstract
The developments of electronic devices based on micron-sized vacuum electron sources during the last decades have triggered intense research on highly efficient carbon based thin film electron emitters. The synthesis of massive arrays of carbon nanotubes that are oriented on patterned Fe catalyst deposited on quartz substrates is reported. The well-ordered nanotubes can be used as electron field emission arrays. Scaling up of the synthesis process should be entirely compatible with the existing semiconductor processes, and should allow the development of nanotubes devices integrated into future technology. The emission from carbon nanotubes array is explained by Fowler-Nordheim tunneling of electrons from tip-like structures in the nanometer range, which locally amplify the applied field by the field enhancement factor beta. We found that the low pressure chemical vapour deposition (LPCVD) system can produce nanotubes capable of excellent emission currents at lower voltages. The carbon nanotubes array shows good field emission with turn on field E(alpha) = 1.30 V/microm at the current density of 3.50 mA/cm2 with enhancement factor beta = 1.22 x 10(2).
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