Abstract
Nano-sized dot array carbon nano-tube (CNT) emitters were fabricated by direct current plasma enhanced chemical vapor deposition. Turn-on voltage in field emission characteristics was reduced from 300 V for uniformly grown vertically aligned CNTs to 140 V for 100 nm dot array CNT emitters. High field enhancement factor β of 5030 was evaluated from Fowler–Nordheim (F–N) plot in 100 nm dot array CNT emitters. We also presented the effect of Ar plasma treatment on the field emission property of CNT emitters. It was found that the field emission characteristics were significantly improved by 2 min. Ar plasma treatment and the F–N plots changed from non-linear to linear after 2–5 min plasma treatment. Present results suggest that observed non-linear F–N plot is related with the structure of CNT tips.
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