Field emission and explosive electron emission process in focused ion beam fabricated platinum and tungsten three-dimensional overhanging nanostructure

Abstract

Abstract Three-dimensional platinum and tungsten overhanging nanogap (∼70 nm) electrodes are fabricated on a glass substrate using focused ion beam milling and chemical vapour deposition processes. Current-voltage (I-V) characteristics of the devices measured at a pressure of ∼10−6 mbar shows space-charge emission followed by the Fowler-Nordheim (F-N) field emission. After the F-N emission, the system enters into an explosive emission process, at a higher voltage generating a huge current. We observe a sharp and abrupt rise in the emission current which marks the transition from the F-N emission to the explosive emission state. The explosive emission process is destructive in nature and yields micro-/nano-size spherical metal particles. The chemical compositions and the size-distribution of such particles are performed.