Abstract
Recently, analytical electron microscopes (AEM), which provide the functions of the transmission electron microscope (TEM), scanning electron microscope (SEM) and energy dispersive X-ray spectrometer (EDS) have been put to practical use with a view to analyzing elements in micro areas, xo improve the performance of this type of AEM, a field emission gun was attached to our AEM instead of a conventional thermionic gun. This has allowed a sellected area smaller than several 100 Å to be easily analyzed. Moreover, an electron energy analyzer (EA) was attached to the AEM for detecting light elements which cannot be detected by the EDS.These modifications have resulted in an advanced type of an AEM, namely, a field emission analytical electron microscope (FEAEM).Fig. 1 shows a general view of our FEAEM. The feature of this FEAEM is that it is designed on the basis of a 100 kV field emission electron microscope provided with a strongly-excited objective lens having a very small aberration coefficient and with an eucentric goniometer tiltable to 60°.
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