Abstract
We have investigated a liquid metal electron source that is expected to give a very bright electron beam and also to resist damage due to ion bombardment of the residual gas molecule by restoring the destruction. Although liquid metal ion sources are in use, very few experimental reports on liquid metal electron sources have been published. Here we study the fundamental characteristics of liquid metal electron sources, with emphasis on beam brightness and emission stability.
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Schedule a callMore From: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures Processing, Measurement, and Phenomena
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