Fiducial markers for increasing the versatility of optical correlation in the measurement of faults on integrated-circuit wafers

Abstract

A microscope-coherent optical processor is used for the measurement of the registration errors on integrated-circuit wafers. The measurements are obtained from the optical correlation of wafers with reference wafer patterns by use of matched spatial filters. Previously, the intricate pattern of the active circuit area of wafers has been used in the correlation process, and a new matched spatial filter had to be created for each different integrated circuit. Here, the results of using comparatively plain fiducial markers on a wafer for the registration-error measurement are presented, and these show that the measurements can be made independent of the design of the integrated circuit while maintaining the advantages and accuracy of the optical correlation technique.