Fibre-coupled monochromatic zero-point sensor for precision positioning systems using laser interferometers

Abstract

This paper focuses on a novel fibre-coupled monochromatic zero-point reference sensor for high-precision measurement and positioning tasks, especially for use in nanopositioning and nanomeasuring machines. The motivation for this development and the basic concept of the confocal-based sensor are explained in detail. Differences from other similar systems also realizing the confocal principle through fibre coupling are pointed out. Furthermore, the optical system design is described. Initial experimental results using this sensor as a probe system in a nanopositioning and nanomeasuring machine, and investigations into the metrological properties are discussed, which underscore the great potential for utilization as a reference sensor.