Abstract
Fibre-optic sensors are examined from a micro-mechanical viewpoint. Theoretical expressions for the signal modulation of three basic designs are given, showing the relationship of geometrical parameters and optical transmission properties of multimode fibres. Intensity modulation is considered, together with various compensation schemes. The possibility of designing sensors with frequency output is pointed out. Design examples are given, together with measured performance data on sensor prototypes. One pressure sensor having an outer diameter of less than 0.5 mm for biomedical applications has been fabricated using silicon micro-machining. Another fibre-optic pressure sensor for industrial applications is described. Finally, a fibre-optic voltmeter based on a micro-mechanical light scanning element is described.
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