Abstract
In order to solve the problem of ultraprecision measurements of micro-holes with high aspect ratios, a tactile fiber probe based on the detection of the returning light energy center is proposed. With an incident fiber, a coupler, and an effluent fiber guiding the emission light, sufficient light energy can be provided for a photodetector, thus the shadowing effect of sidewall in a micro-hole can be eliminated. By converting the displacement of a probe tip to changes of the returning light energy center, measurement of the micro-holes with high aspect ratios can be realized. Experimental results indicate that the fiber probe has a spatial resolution of up to 0.04μm, a triggering repeatability better than 0.06μm, and a static state stability up to 0.41μm in 30min. A micro-hole with a nominal diameter of Φ200μm and thickness of 2mm has been measured, the measurement result of diameter at a depth of 1mm is 206.03μm, with a standard deviation of 0.067μm, and an aspect ratio of 5:1.
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