Abstract
The article discusses the technological and operational characteristics of a fiber-optic sensor of molecular hydrogen concentration based on the Fabry–Perot interferometer. The possibility of registering the hydrogen concentration by deformation of a membrane with an Al2O3/Ta/SiO2 layer deposited on its outside surface is shown. The deposited α-tantalum film provides high diffusion of hydrogen, and allows you to create sensors with a fast response to hydrogen, less than 10s. The almost complete absence of cross-sensitivity of the sensor to temperature in the range from 20 °C to 80 °C at a hydrogen pressure of 1 atm.
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