Abstract
The ratio of neutral atom “current” to ion current (I 0/I +) has been investigated in the beam of a r.f. ion source as a function of oscillator power and extraction voltage using hydrogen and helium r.f. discharges. Neutral particles had an energy of few keV according to the extraction voltage. For detecting neutral particles two methods have been employed: a calorimetric method and a method based on secondary electron emission. TheI 0/I + ratios were found between 0.75–0.35 in the case of hydrogen and between 0.82–0.57 with helium. A simple method for decreasing the neutral component has also been tested.
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