Abstract
The structure and magnetic properties of the films of titanium oxides doped with magnetic impurities are investigated both in as-deposited state and after thermal treatments in vacuum. In the as-deposited films, ferromagnetism was shown to be caused by magnetic cluster formation during deposition. The vacuum quenching of Ti 1− x Co x O 2− δ films results in the partial transition of a magnetic impurity from clusters into a matrix. The low-temperature vacuum annealing leads to a rise of weak ferromagnetism in the semiconductor solid solution.
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