Abstract
Indium-tin oxide (ITO)-Fe-cluster composite films were fabricated by plasma-gas-condensation-type cluster beam deposition and RF helicon sputtering method, and the structural, optical, electrical and magnetic properties of the films were investigated. The optical transmittance of about 90% is obtained for the Fe cluster layer thickness of 10 nm although it is decreased with increasing the cluster layer thickness. The resistivity is further decreased by embedding metalic Fe clusters into ITO matrix and a resistivity value of about an order of 10/sup -4//spl Omega/ cm was obtained. Moreover, the ITO-Fe cluster composite films show ferromagnetism at room temperature even for a cluster layer thickness of 10 nm.
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