Abstract
A microscanner system for optical sensing of angle and distance is presented, which is controlled by a ferromagnetic shape memory (FSMA) microactuator. The main features of the FSMA microactuator are a large scanning angle up to 60 deg and a large bandwidth of frequencies given by a broad off-resonance regime below the thermal cut-off frequency at about 120 Hz and the resonance regime between 160 and 220 Hz. The small size and low mass of the FSMA microactuator allows the design of a very compact and robust scanner system, which enables new portable and mobile applications. In this paper, the sensing of objects in road traffic is pursued as an application in the automotive field, which requires small moving masses being insensitive to vibrations and shock. The main components of the microscanner system are the FSMA microactuator, a pulsed laser diode, an integrated angle sensor, an avalanche diode and a time-of-flight measurement setup for distance acquisition. The maximum scanning range of the first prototype is about 30 m for cooperative (reflecting) objects. The angular resolution is about 0.5 ◦ .
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