Abstract
TiO2:Co thin films on ITO (Indium-tin-oxide)/PET (Poly Ethylene Terephthalate) flexible and glass substrates were fabricated via DC magnetron co-sputtering at room temperature. The samples deposited on glass substrates were subjected to annealing processes at 473 K for 2 h to improve the crystallization of the material. Both TiO2:Co/ITO/PET and TiO2:Co/glass thin films exhibited excellent optical properties with more than 80% transmission in the visible region. An increase on ITO/PET surface temperature was detected during the synthesis of the samples; this variation in the ITO substrate (∼ 2 K) was associated to impact energetic of ion or atoms bombarded during the deposition process. X-ray diffraction measurements evidenced local phases to growth on the flexible substrate; the random distributions of Cobalt crystals into the rutile and anatase phases were associated to a crystalline lattice embedded with magnetic ions. A configuration of small grains and absence of cluster formation on the surface of thin films was observed through SEM and AFM measurements. From this topographic study and MFM measurements evidenced that surface grains were not constituted magnetic domains formation in the thin films. The ferromagnetic-like behavior was observed in a magnetization as function of field measurement by PPMS. M vs H curves at room temperature for TiO2:Co/ITO/PET thin films, showed the hysteresis loop. The dipolar interaction between Cobalt ions without formation of domains were correlated to the magnetic behavior in the material, as the doping concentration is lower than 12%.
Highlights
In recent years, development of flexible electronic devices has been studied because to the difficulty of the degradation quality at high temperatures and fabrication method depending on the organic or inorganic material [1]
This work presents a study of the synthesis parameters and morphological, structural, and magnetic properties of TiO2: Co thin films deposited via DC magnetron co-sputtering on ITO/PET flexible and glass substrates at room temperature
It was observed that the substrate affects the crystallization of the compound on the surface; glass substrate thin films presented an amorphous phase, before and after annealing process; to evidence crystallization processes of TiO2 thin films on non-crystalline substrates, annealing stages at high temperatures must be carried out (T ! 975 K) [21,222]
Summary
Development of flexible electronic devices has been studied because to the difficulty of the degradation quality at high temperatures and fabrication method depending on the organic or inorganic material [1]. For doped TiO2 synthesis, different methods have been implemented such as template sol-gel method [12], RF magnetron sputtering [17], molten-salt method [18], Czochralski growth (CZ) method [19], etc. These synthesis methods have been used to obtain different types of nanostructure formations such as nanoparticles, crystals, thin films, among others. This work presents a study of the synthesis parameters and morphological, structural, and magnetic properties of TiO2: Co thin films deposited via DC magnetron co-sputtering on ITO/PET flexible and glass substrates at room temperature. A correlation between the synthesis parameters and physical properties of the material is presented
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