Ferromagnetic Co-doped ZnO film and fine patterns prepared using photosensitive sol–gel method

Abstract

Using zinc acetate and cobalt acetate as raw materials, isopropanol as solvent, and monoethanolamine as stabilizer, photosensitive Co-doped ZnO sol was prepared by chemical modification with benzoylacetone. Chelate rings of benzoylacetone with zinc ions are formed in the Co-doped ZnO sol and corresponding gel films. Irradiation of the gel film by a UV lamp in air leads to decomposition of the chelate ring. Selective irradiation followed by leaching and annealing gave rise to the formation of Co-doped ZnO fine patterns. The Co-doped ZnO film prepared using the photosensitive sol–gel method had a wurtzite structure and showed room-temperature ferromagnetic property.