Abstract
This paper reviews deposition, integration, and device fabrication offerroelectric PbZrxTi1-xO3 (PZT) films forapplications in microelectromechanical systems. As examples, a piezoelectricultrasonic micromotor and pyroelectric infrared detector array are presented.A summary of the published data on the piezoelectric properties of PZT thinfilms is given. The figures of merit for various applications are discussed.Some considerations and results on operation, reliability, and depolarizationof PZT thin films are presented.
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