Ferroelectric thick films on LTCC substrates - preliminary results

M Hrovat,J Kita,L Golonka,M Kosec,J Holc,D Belavic,J Bernard,A Dziedzic,S Drnovsek

doi:10.1109/isse.2003.1260511

Ferroelectric thick films on LTCC substrates - preliminary results

M Hrovat, J Kita + Show 7 more

https://doi.org/10.1109/isse.2003.1260511

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Publication Date: Jan 1, 2003

Affiliation: Jožef Stefan Institute, Wrocław University of Science and Technology

#LTCC Substrate #Ferroelectric Thick Films + Show 8 more

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Abstract

PZT (PbZr/sub 0.53/Ti/sub 0.47/O/sub 3/ with 6% of PbO and 2% of Pb/sub 5/Ge/sub 3/O/sub 11/) thick films with a low sintering temperature were printed and fired on either pre-fired or green LTCC foils (LTCC 951, Du Pont). The electrical characteristics of these PZT thick films, together with a set prepared on alumina substrates, were compared. The electrical characteristics of the samples fired at 800/spl deg/C deteriorated significantly due to interactions between the LTCC substrate and the PZT layer. It is presumed that the SiO/sub 2/ that diffused from the LTCC into the PZT layers formed low-permitivity lead-based silicates, which are detrimental to the dielectric properties of the PZT.

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