Abstract
High-quality Pb(Zr0.52Ti0.48)O3 (PZT) thin film was fabricated by pulsed laser deposition on flexible mica substrates. X-ray diffraction results showed that the growth of PZT thin film is extended along (001) preferred orientation without any other secondary phases. The electrical properties measurements show that the flexible PZT thin films possess excellent ferroelectric and piezoelectric properties. The remnant polarization (2Pr) and the piezoelectric coefficient (d33) were measured to be 32 μC/cm2 and 15 pm/V, respectively, when the flexible thin film was unbending. Furthermore, the flexible PZT thin films exhibit high stability under mechanical bending. The saturated polarization and dielectric constant of PZT capacitors decrease when the capacitors change from the central area to the edge under a certain bending state. This was interpreted based on the out-of-plane tensile strain change for each capacitor.
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