Abstract
Dysprosium (Dy3+)-substituted lead zirconate titanate (PDZT) thin films were synthesized in order to improve the ferroelectric properties of lead zirconate titanate (PZT) films by crystal anisotropy enhancement. Thin films of Pb1.00-(3x/2)Dyx(Zr0.40Ti0.60)O3 (A-PDZT) and Pb1.00Dyx(Zr0.40Ti0.60)1-(3x/4)O3 (B-PDZT) were deposited on (111)Pt/Ti/SiO2/(100)Si substrates by chemical solution deposition (CSD). The ferroelectric properties of A- and B-PDZT thin films were compared with those of a non-substituted PZT film. Dy3+-substitution based on B-PDZT (x=0.02) enhanced the tetragonality of PZT film, which increased the Pr value of B-PDZT from 20 µC/cm2 up to 25 µC/cm2. On the other hand, both the c/a ratio and Pr value of the A-PDZT film decreased with increasing x continuously. These results suggest that the ferroelectric property was enhanced by the Dy3+-substitution for B-site in PZT crystal.
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