Ferrite-Integrated On-Chip Inductors for RF ICs

Abstract

This letter reports the design and fabrication of on-chip radio-frequency (RF) inductors with integrated-ferrite thin Alms, which show substantial improvement over air-cored inductors, e.g., 19%-38% and 17%-28% increase in inductance (L) for Y2.8B0.2Fe5O12 and Co7ZrO9 thin-film inductors, respectively, and 32%-55% improvement in quality factor (Q) of Co7ZrO9 sample, which are all measured across 0.1-9 GHz. It demonstrates the feasibility for making the ferrite-integrated high-performance compact on-chip inductors for RF ICs.