Abstract
FePd 합금박막을 스퍼터링법으로 초격자 박막의 형태로 제작하고 기판온도, 조성변화에 따른 미세구조 및 자기적 특성을 분석하였다. FePd 합금박막의 규칙화를 위한 열처리 온도를 FePt의 열처리 온도에 비해 <TEX>$150^{\circ}C$</TEX> 낮추는데 성공하였다. 또한 FePd 규칙화 합금 박막은 화학양론적 조성일 때 장범위 규칙도는 가장 높은 값을 가졌으며(Fe조성 50 at.%, S = 0.79), 자기이방성 에너지는 Fe 조성이 약간 낮은 조성에서(Fe조성 48 at.%, <TEX>$K_U=1.6{\times}10^7\;erg/cm^3$</TEX>) 가장 높은 값을 나타내었다. 이것은 FePd 합금박막의 조성이 장범위 규칙도와 수직자기이방성에 직접적으로 영향을 미친다는 것을 나타낸다. Epitaxial <TEX>$L1_0$</TEX> FePd (001) thin films were successfully manufactured by sputtering deposition method. The structure and magnetic properties of FePd thin films were characterized as a function of Fe compositions. It was found that the long-range ordering parameter had a maximum for the stoichiometric composition, whereas the magnetic anisotropy had a maximum as the Fe content is decreased to slightly above the stoichiometric composition. This indicates that the stoichiometry is directly contributed to the chemical ordering and the magnetic anisotropy. These results imply that nonstoichiometric FePd compositions, with a slight excess of Pd, may in fact be preferred for applications that require high magnetic anisotropy.
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