Abstract
Micromachining by ablation using a femtosecond erbium-doped fiber-laser system was studied. The system consisted of a passively mode-locked fiber-laser oscillator using a nonlinear-amplifying loop mirror, a pulse extractor, and a final amplifier. The output had a pulse width of 240fs and a peak power of 25kW at a repetition rate of 10kHz. A 6-μm-wide ablation trace was obtained by focusing on an amorphous carbon film. For direct amplification without a pulse extractor, the repetition rate was 12MHz, the peak power decreased to 5.1kW, and the average power was 40mW. For direct amplification, the ablation trace of the amorphous carbon film was as large as 16μm wide. However, direct amplification was suitable for micromachining of plastics: cutting of polyvinyl chloride film with a width of 4μm was performed. The optical damage was observed at a facet of a fiber-optic connector after an operation for 60min by pulse extraction and amplification, whereas no damage was observed for direct amplification.
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