Abstract

Femtosecond laser ablation experiments were performed using a Ti:sapphire laser with 800 nm wavelength in ambient air and a pulse duration of approximately 40 fs. We found that the laser fluence to breakdown this material is 0.5 J/cm2. The ablation rate varies with the pulse number and pulse energy. Microholes around 200 µm in diameter with various depths are drilled in polyurea areogel samples. The hole quality and the structural details are examined using an optical microscope and a scanning electronic microscope (SEM). The material removal mechanisms are proposed. This work provides insights for micromachining polymers with porous structures using femtosecond laser.Femtosecond laser ablation experiments were performed using a Ti:sapphire laser with 800 nm wavelength in ambient air and a pulse duration of approximately 40 fs. We found that the laser fluence to breakdown this material is 0.5 J/cm2. The ablation rate varies with the pulse number and pulse energy. Microholes around 200 µm in diameter with various depths are drilled in polyurea areogel samples. The hole quality and the structural details are examined using an optical microscope and a scanning electronic microscope (SEM). The material removal mechanisms are proposed. This work provides insights for micromachining polymers with porous structures using femtosecond laser.

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