Femtosecond laser processing with a holographic line-shaped beam.

Abstract

Line-shaped femtosecond pulses are well-suited to large-area machining with high throughput in laser cutting, peeling, and grooving of materials. First, we demonstrated the single-shot fabrication of a line structure in a glass surface using a line-shaped pulse generated by a holographic cylindrical lens displayed on a liquid-crystal spatial light modulator. We found the line structure was uniform and smooth near the ends because of the ability to precisely control the intensity distribution and to achieve single-shot fabrication. Second, we demonstrated a line-shaped beam deformed three-dimensionally for showing the potential of holographic line-shaped beam processing. Third, we demonstrated laser peeling of an indium tin oxide film. We found that little debris around the fabricated area was observed, because the debris was removed by the beam itself. Last, we demonstrated laser grooving of stainless steel. We found the swelling of the surface included upwardly growing nanogratings, although many line-shaped pulse irradiations were given. The swelling was caused by the depositions of the debris on the top of the nanogratings.