Abstract
Depressed cladding, buried waveguides, and beam splitters in z cut LiNbO3 crystals were fabricated by femtosecond laser inscription. Straightforward cladding waveguides were optimized by varying the laser writing conditions. Minimum propagation losses of 0.74 dB / cm at 1.05-μm wavelength were obtained. Two-dimensional 1 × 2 and three-dimensional 1 × 4 beam splitters were realized. 1 × 2 Y-splitters with circular cladding geometry are fabricated with 60-μm diameter input ends, corresponding to two 30-μm diameter output ends, respectively. The full branching angle between the two output arms are changing from 0.5 deg to 2.4 deg. The splitters were characterized both experimentally and numerically, showing excellent properties including symmetrical output ends and equalized splitting ratio. 1 × 4 splitters with square cladding geometry reached splitting ratios of 26 ∶ 26 ∶ 22 ∶ 26. The micro-Raman spectra indicate the slight microstructural lattice changes in the track and core region.
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