Abstract

Nanoscale periodical chemical composition modification of different two-component compound materials GaAs, CdTe, W0.5C and TiC was realized for the first time through multi-shot femtosecond laser irradiation of their surfaces. The resulting surface modification represents periodical nanoscale ripples with different chemical composition in valleys and ridges. The underlying mechanism is related to a sequence of elementary processes, such as laser excitation surface plasmon-polariton, their interference with the incident laser radiation, inhomogeneous surface heating and incongruent cavitation-like material removal. The latter mechanism is responsible for higher evaporation rate of the components with higher volatility, resulting in growth of surface concentration of low-volatility components.

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