Abstract

This work presents a femtosecond laser fabrication method for precision-engineered nanopillar arrays, applicable for surface-enhanced Raman scattering (SERS) substrates. The proposed method consists of two steps: (1) fabrication of nanopillar arrays using femtosecond laser-induced two-photon polymerization (TPP) technology; and (2) deposition of Ag nanoparticles on the fabricated nanopillar arrays. Nanopillar arrays of the proposed SERS substrates are optimized with geometrical parameters of diameter, height, spacing, and arrangement. A limit of detection (LOD) down to 10-7 mol/L for Rhodamine 6G solution is achieved and the enhancement factor is estimated to be up to 2 × 103. The experimental results indicate that the proposed SERS substrates have potential applications in biomedical detection, food safety monitoring, and quality control.

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