Abstract
Diamond-like carbon (DLC) coatings were deposited on Si substrates using a hot filament diode discharge and they were irradiated with ultrashort laser pulses (800nm, 150fs, <4J/cm2). The laser-treated films were examined using optical microscopy, Raman spectroscopy, SEM, AFM and white-light interferometery. Damage threshold of 0.16J/cm2 and ablation rates below 110nm/pulse were determined. Changes in the structure of the laser-irradiated films were showed by means of Raman investigations. The laser-treated samples were etched and the depths of modified material layers were determined. Ablation experiments with longer laser pulses (1064nm, 100ns, <3J/cm2) were also performed and the irradiated DLC films were afterwards analyzed using the same procedures. Dissimilarities in the structure changes induced by fs-and ns-laser irradiation were observed and comments are given.
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