Abstract
In this study, the propagation characteristics of surface acoustic waves (SAWs) in ZnO/Si and ZnO/AlN/Si structures are investigated. The phase velocity, the coupling coefficient and the temperature coefficient of frequency (TCF) of the first two modes of SAWs for the ZnO/Si structure are numerically analyzed and compared to experimental data. The results show that a large coupling coefficient of 3.5% associated with a phase velocity of 4600m/s and a TCF of −42.8ppm/°C are obtained in mode 1. Close agreement is achieved between the numerical and experimental results.Inserting an AlN layer between the ZnO and Si layers is shown to increase the performance of the SAW resonator. The simulation results indicate that for mode 0, a temperature compensation of 0ppm/°C and high velocities of up to 4600m/s are obtained by optimizing the AlN/ZnO thickness ratio. These results demonstrate that the ZnO/AlN/Si structure can be used to design wide-band and temperature-compensated SAW devices.
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