Abstract
The FEI Helios NanoLab 460F1 is a highly advanced dual beam FIB-SEM platform for imaging and analytical measurements, transmission electron microscopy (TEM) sample and atom probe (AP) needle preparation, process development and process control. For these purposes, the FEI Helios NanoLab 460F1 combines an ElstarTM UC technology electron column for high-resolution and high material contrast imaging with the high-performance TomahawkTM ion column for fast and precise sample preparation. The FEI Helios NanoLab 460F1 is additionally equipped with the MultiChemTM gas delivery system, an EasyLiftTM nanomanipulator, a cooling trap, an inert gas transfer (IGT) holder loadlock, a quick loader, a FlipStage 3TM, an EDX-System and an STEM III detector. This instrument is one of the few dual beam systems which combine an IGT holder loadlock with a FlipStage 3+TM EasyLiftTM nanomanipulator. Typical examples of use and technical specifications for the instrument are given below.
Highlights
ETD – Everhart Thornley detector TLD – through-the-lens detector ICE – in-chamber electron ICD – in-column detector STEM 3+ – STEM detector (BF, DF, HAADF) MD – mirror detector CBS – retractable backscatter detector CCD – charge-coupled detector Nav-Cam – in-chamber navigation camera
The con guration of the FEI Helios NanoLab 460F1 allows a variety of advanced imaging and preparation techniques to be applied to wide bunch of solid state materials
The FEI Helios NanoLab 460F1 is not intended for the investigation of aqueous, ferromagnetic or organic samples without further discussions with both of the instruments o cers and the ER-C general management
Summary
*Cite article as: Ernst Ruska-Centre for Microscopy and Spectroscopy with Electrons. Journal of large-scale research facilities, 2, A59.
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