Abstract
This chapter presents an approach of hysteresis identification and compensation of piezoelectric actuators by resorting to an intelligent hysteresis model. In particular, a least squares support vector machine (LSSVM)-based hysteresis model is developed and used for both purposes of hysteresis identification and hysteresis compensation. By this way, the inverse hysteresis is not needed in the feedforward hysteresis compensator because the hysteresis model is directly used. The effectiveness of the presented idea is validated by a series of experimental studies on a piezoactuated micro-/nano-positioning system.
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