Abstract
Advanced feedforward control methods enable mechatronic systems to perform varying motion tasks with extreme accuracy and throughput. The aim of this paper is to develop a data-driven feedforward controller that addresses input nonlinearities, which are common in typical applications such as semiconductor back-end equipment. The developed method consists of parametric inverse-model feedforward that is optimized for tracking error reduction by exploiting ideas from iterative learning control. Results on a simulated set-up indicate improved performance over existing identification methods for systems with nonlinearities at the input.
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