Abstract
Micro-displacement manipulator consists of piezoelectric actuator and flexure hinge is being widely used in precision positioning technology for its high resolution of displacement, high stiffness and fast frequency response. However, the hysteresis nonlinearity of actuator and vibration limited its control accuracy. In order to improve the positioning precision, the relationship between input voltage and output displacement was studied, the hysteresis nonlinearity was described by mathematical method, and a closed-loop controller was proposed to control the hysteresis and vibration. Experiment results revealed the proposed closed-loop controller can enhance the control precision of micro-displacement manipulator.
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